Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in Surface Acoustic Wave Sensing Devices

This study aims to discuss the combined theoretical and experimental results of elastic properties tungsten trioxide films supported on Quartz (YX)/45°/10° resonator form surface acoustic wave (SAW) devices. The SAW systems with different thicknesses WO3 thin were imaged structurally characterized by X-ray diffraction, atomic force, transmission electron microscopy. deposited (100, 200, 300 nm thickness) crystallized in a single monoclinic phase. acoustoelectric system obtained combining simulations measurements. modeling devices has been performed finite element boundary methods (FEM/BEM). constants at room temperature assessed via electrical admittances experiments light calculations. gravimetric effect layers is observed shift resonance frequency lower values as thickness increases. Moreover, losses are affected dielectric while resonant decreases almost linearly. revealed strong displacement fields low function thicknesses. For all layers, measured Young’s moduli Poisson’s ratios 8 GPa 0.5, respectively.